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Industrial Vacuums > Nilfisk CFM > Specialty Vacuums > Captures toxic semiconductor gases and ultra fine particulate.

Specialty Vacuums

Series: SS Vapor - Captures toxic semiconductor gases and ultra fine particulate.

The Nilfisk SS Vapor vacuum captures toxic semiconductor gases and ultra fine particulate. An impregnated carbon filter cartridge captures and retains such toxic gases as arsine, phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.



  • Commonly used in semiconductor facilities.
  • Filtration uses dust bag, carbon filter, micro filter, upstream HEPA filter, and HEPA exhaust filter.


Data Units
Voltage @ 60 Hz 115/220 V
Watts 1100
Waterlift, max 82"
Airflow, max 45 cfm
Tank Capacity 3.25 gallons
Sound Level 61 dB(A)
Dimensions (L x W x H)
22" x 22" x 38.5"

For more details and information, please refer to the product brochure.

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    All Rights Reserved.

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